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暑期课程:Bio Nano/Micro Electro-Mechanical Systems (BioNEMS/MEMS)
更新时间 :2018-07-19 16:03:52   浏览次数::

暑期课程:Bio Nano/Micro Electro-Mechanical Systems (BioNEMS/MEMS)

授课人:王归仁(Guiren Wang  西北大学特聘教授

美国南卡罗莱纳大学终身教授      

   间:20187 24-82日早上8:00-12:00

   点:西北大学太白校区科技楼2层光子所会议室

 

课程简介:

The course focuses on the fundamentals of nano/microfabrication, metrology and their applications in biomedical engineering and science. The fabrication covers photolithography, nano/microfabrication for nano/microstructures, etching techniques, additive techniques, microsystem design, MEMS integration and packaging issues. The metrology introduces modern imaging technologies, e.g., fluorescence spectroscopy, STED and two photon nanoscopy, etc. The applications include design and analysis of microactuators, biomicrosensors and biomedical devices.

参考书目:

  • Fundamentals of Microfabrication and Nanotechnology, Third Edition, by Marc J. Madou, CRC. (2011).

    • Volume 2: Manufacturing Techniques for Microfabrication and Nanotechnolgy.  ISBN-13: 978-1420055191

    • Volume 3 From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications. ISBN-13: 978-1420055160.

       

       

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      物理学院

      光子学与光子技术研究所

                                            2018 719