暑期课程：Bio Nano/Micro Electro-Mechanical Systems (BioNEMS/MEMS)

授课人：王归仁（Guiren Wang）  西北大学特聘教授

美国南卡罗莱纳大学终身教授      

时   间：2018年7月 24日-8月2日早上8:00-12:00

地   点：西北大学太白校区科技楼2层光子所会议室

课程简介：

The course focuses on the fundamentals of nano/microfabrication, metrology and their applications in biomedical engineering and science. The fabrication covers photolithography, nano/microfabrication for nano/microstructures, etching techniques, additive techniques, microsystem design, MEMS integration and packaging issues. The metrology introduces modern imaging technologies, e.g., fluorescence spectroscopy, STED and two photon nanoscopy, etc. The applications include design and analysis of microactuators, biomicrosensors and biomedical devices.

参考书目：

• Fundamentals of Microfabrication and Nanotechnology, Third Edition, by Marc J. Madou, CRC. (2011).

  • Volume 2: Manufacturing Techniques for Microfabrication and Nanotechnolgy.  ISBN-13: 978-1420055191

  • Volume 3 From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications. ISBN-13: 978-1420055160.

     

     

    欢迎广大师生届时参加！

     

    物理学院

    光子学与光子技术研究所

                                          2018年 7月19日